| Area of application: |
Semiconductors, FPD and industrial processes, particularly CVD systems. |
| Description: |
Downstream pressure control
and isolation valve
Compact design
Fast operation
High-performance, integrated controller
Low minimum controllable conductance |
| Nominal inside diameters (ID): |
40 (1 1/2") - 100 (4" ) |
| Body material: |
Stainless steel |
| Feedthrough: |
Rotary feedthrough (double seal) |
| Sealing technology: |
Rotary feedthrough (double seal) |
| Sealing materials: |
Bonnet: none / Gate: FKM (VITON®) |
| Cycles until first service: |
100000 |
| Leak rate: |
Body: < 1 . 10-9 mbar ls-1
Valve seat: < 1 . 10-9 mbar ls-1 |
| Pressure control |
|
|
The controller ensures fast and accurate pressure control. By operating the LEARN
function needs to be done only once at start-up. The system parameters are
automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process
conditions (species of gas, gas flow) and thus ensures optimum pressure control at
any time. |
|
| Position control |
|
|
In position control mode the valve plate can be moved to any position. |
|
| Display |
|
|
Status and position are displayed by means of 4 bright digits. |
|
| Remote operation |
|
|
The valve can be controlled by a host computer via RS232, RS422, RS485, Logic,
DeviceNet®, Ethernet, Profibus, CC Link or EtherCAT interface. The RS232 interface and the field busses also have digital inputs to close and open
the valve. In addition, digital outputs are available for «open» and «closed» (status of
valve). Control via Logic interface performs via digital and analog inputs and outputs. |
|
| Service Port |
|
|
The valve has a service port (RS232) for connecting a computer or a service box. VAT
can provide two software versions which, independent of the hoster computer, allow a
variety of functions. For connecting the computer to the valve, a special cable designed by VAT is
required. |
|
| Power Failure Option (PFO) |
|
|
This function is optionally available. It closes or opens the valve automatically at
power failure. |
|
| Sensor Power Supply (SPS) |
|
|
Optionally, the valve can be provided with a ±15 V DC power supply unit for the
sensor/s. |
|
| RS232 interface |
|
Serial RS232-Interface:
|
Control of all functions,
selectable baud rate (600 - 115200) |
|
Digital inputs:
|
Close valve and open valve |
|
Digital outputs:
|
Valve closed and valve open |
|
Analog outputs:
|
Actual pressure and actual valve positon (optional) |
|
| Logic interface |
|
Digital inputs:
|
Close valve and open valve |
|
|
Inhibit operation via service port |
|
Digital outputs:
|
Valve closed and valve open |
|
Analog inputs:
|
Pressure- or position setpoint |
|
Analog outputs:
|
Actual pressure and actual valve positon |
|
| DeviceNet® interface |
|
|
Control of all functions. DeviceNet® group 2 slave with Polling, Bit Strobe and Change of State/Cyclic Transmission. UCMM port (unconnected message manager) is available. 'Offline Connection Set' according to DeviceNet® specification release 2.0 is implemented. |
|
| Technical Data |
|
Power required:
|
+ 24 V DC (±10%)
38 W max. (controller + motor)
10 W max. for Power Failure Option
36 W max. for Sensor Power Supply |
|
Sensor supply:
|
24 V DC or ±15 V DC |
|
Sensor input voltage:
|
- Signal voltage 0 - 10 V DC linear with pressure
- Input resistance Ri = 100kΩ
- Resolution 0.23 mV
- Sampling rate 10 ms |
|
Control accuracy:
|
0.1% of maximum sensor range |
|
Step resolution:
|
> 28 000 |
|
Ambient temp.:
|
50°C max. (<35°C recommended) |
|
Power Failure Option:
|
Battery type: Ultracap
Charging time: 2 min |
|
|
Durability (25°C) up to 10 years |
|
Input (Interface):
|
Digital: control with relay, opto coupler or
voltage source (5-24 VDC) |
|
|
Analog: 0 - 10 VDC, Ri > 100kOhm |
|
Output (Interface):
|
Digital: potential free relay contacts,
70V max., 500 mA max., 10 W max. |
|
|
Analog: 0 - 10 VDC, 1 mA max. |
|
